Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography
Download or Read eBook Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography PDF written by P. Rai-Choudhury and published by SPIE Press. This book was released on 1997 with total page 780 pages. Available in PDF, EPUB and Kindle.
Author | : P. Rai-Choudhury |
Publisher | : SPIE Press |
Total Pages | : 780 |
Release | : 1997 |
ISBN-10 | : 0819423785 |
ISBN-13 | : 9780819423788 |
Rating | : 4/5 (85 Downloads) |
Book Synopsis Handbook of Microlithography, Micromachining, and Microfabrication: Microlithography by : P. Rai-Choudhury
Book excerpt: The dynamic field of lithography demands an authoritative handbook for process development and production, and to aid in the training of scientists and engineers. It contains process details, recipes, tables, charts, etc., and is useful as a reference book or as a textbook. Copublished with IEE.